JPH043006Y2 - - Google Patents

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Publication number
JPH043006Y2
JPH043006Y2 JP1985027557U JP2755785U JPH043006Y2 JP H043006 Y2 JPH043006 Y2 JP H043006Y2 JP 1985027557 U JP1985027557 U JP 1985027557U JP 2755785 U JP2755785 U JP 2755785U JP H043006 Y2 JPH043006 Y2 JP H043006Y2
Authority
JP
Japan
Prior art keywords
susceptor
radiation
substrate
plate
heated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985027557U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61147275U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985027557U priority Critical patent/JPH043006Y2/ja
Publication of JPS61147275U publication Critical patent/JPS61147275U/ja
Application granted granted Critical
Publication of JPH043006Y2 publication Critical patent/JPH043006Y2/ja
Expired legal-status Critical Current

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  • Crystals, And After-Treatments Of Crystals (AREA)
JP1985027557U 1985-02-27 1985-02-27 Expired JPH043006Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985027557U JPH043006Y2 (en]) 1985-02-27 1985-02-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985027557U JPH043006Y2 (en]) 1985-02-27 1985-02-27

Publications (2)

Publication Number Publication Date
JPS61147275U JPS61147275U (en]) 1986-09-11
JPH043006Y2 true JPH043006Y2 (en]) 1992-01-31

Family

ID=30524623

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985027557U Expired JPH043006Y2 (en]) 1985-02-27 1985-02-27

Country Status (1)

Country Link
JP (1) JPH043006Y2 (en])

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6092820U (ja) * 1983-11-30 1985-06-25 株式会社日立国際電気 半導体気相成長装置

Also Published As

Publication number Publication date
JPS61147275U (en]) 1986-09-11

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